Waterloo Advanced Technology Lab
http:// www.WATLab.com  or  http://leung.uwaterloo.ca/WATLab
University of Waterloo - Chemistry 2- 059-066/261 -  Tel: 519-888-4567 ext. 35826
Director - Professor Tong Leung

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Last Updated2015-03-26 08:35
Contact us at: manager@watlab.com or director@watlab.com
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  13 March 2015 - Canada's first IBL system to begin installation today  - Commissioning of Canada's first ion beam lithography (IBL) system has began this week.  Manufactured by Raith, this IBL tool will allow true 3D nanofabrication and nanolithography over a large write-field with an impressive ultrahigh spatial resolution of sub-10 nm.  Like the Helium Ion Microscope (and a few other tools in WATLab), this is a unique tool in Canada (with just one other older system in southern U.S. and less than 10 in the rest of the world). This tool will provide us and all Canadian users new capabilities to begin constructing novel 3D quantum devices at the nanoscale.  This tool is made possible with funding from CFI, Government of Ontario, and University of Waterloo.  Installation is expected to go on in the next 5-10 days.


  11 March 2015 - New ESEM to be installed in early April  - We are preparing our site for installation of a new FEI Quanta FEG 250 system.  This environmental SEM will allow us to look at "wet" samples and we expect to begin installation by early April.


How to become a certified SEM user?  Please follow the FAQ link above or here for more details.  Please contact Nina@watlab.com to arrange for SEM training and certification.


Looking for an exciting graduate or undergraduate research project in nanosciences and nanotechnology?   Please contact tong@watlab.com for further information. 



Established with funding support from Canada Foundation for Innovation and the Province of Ontario in 1999, WATLab is the first multidisciplinary materials research centre in Canada's Technology Triangle.  WATLab offers a complete toolset for advanced materials research and emerging technology development.  Most of our instrument systems are state-of-the-art and some are unique in Canada, and they include:

  • all areas of microscopy and diffraction [Zeiss Libra 200MC TEM, Zeiss Leo 1530 and UltraPlus FESEMs (with EDX/OIM), Zeiss Orion Plus HIM, Omicron VT-STM, DI D3500 Nanoman and Asylum BIO-3D AFMs, Olympus LMs; Anton Paar SAXS, PANalytical X'pert Pro MRD HR-XRD and MPD Powder XRD] - Contact Nina@watlab.com  for SEM & XRD; Lei@watlab.com for AFM, HIM, FIB & TEM;  Yan@watlab.com for LM, TEM, XRD & SAXS.

  • spectromicroscopy and spectroscopy [VGS ESCALab 250 Imaging ESCA, IONTOF SIMS-5, PE LS55 PL, PE Lambda 35 &1050 UV-Vis, Bruker Senterra-2 Raman, Bruker Tensor 27 FTIR] - Contact Liyan@watlab.com for ESCA & Spectroscopies; Joseph@watlab.com for SIMS;

  • bulk characterization [QD Dynacool PPMS, QD SQUID-VSM MPMS] - Contact Shanti@watlab.com ;

  • lithography and nanomachining [Nabity and Fibics EBLs, Raith IBL, IMP Xpress Maskless OL, Zeiss Auriga FIB-SEM, DI Nanoman NL, Fibics NPVE];

  • wet and dry materials synthesis (all areas); and

  • rapid device prototyping (all areas). 

We offer pay-per-use service for both academic and industrial users at competitive rates, with our expert operators providing sample characterization measurement (and analysis).  For a selected number of tools (e.g. SEM), we also provide training to allow the users to access the tools through a self-serve booking system. 

To submit samples for analysis, please fill in Form A (and Form B for University of Waterloo users) above, and contact the respective technical specialists.  For all other enquiries and guided lab tours, please contact manager@watlab.com.


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